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ASTM E1127-03

Standard Guide for Depth Profiling in Auger Electron Spectroscopy

STANDARD published on 10.5.2003

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The information about the standard:

Designation standards: ASTM E1127-03
Note: WITHDRAWN
Publication date standards: 10.5.2003
The number of pages: 5
Approximate weight : 15 g (0.03 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM E1127-03 :

Keywords:
angle lapping, angle-resolved AES, Auger electron spectroscopy, ball cratering, compositional depth profiling, cross sectioning, depth profiling, depth resolution, sputter depth profiling, sputtering, thin films, ICS Number Code 71.040.50 (Physicochemical methods of analysis)