
Standard Practice for Reporting Sputter Depth Profile Data in Secondary Ion Mass Spectrometry (SIMS)
STANDARD published on 24.4.1987
Designation standards: ASTM E1162-87(2001)
Note: WITHDRAWN
Publication date standards: 24.4.1987
The number of pages: 3
Approximate weight : 9 g (0.02 lbs)
Country: American technical standard
Category: Technical standards ASTM
Keywords:
data analysis-spectrochemical, depth profiling, secondary ion mass spectrometry (SIMS), spectrometry-mass, sputter depth profiling data, surface analysis-spectrochemical analysis, ICS Number Code 71.040.50 (Physicochemical methods of analysis)