ASTM E2244-02

Standard Test Method for In-Plane Length Measurements of Thin, Reflecting Films Using an Optical Interferometer

STANDARD published on 10.10.2002

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The information about the standard:

Designation standards: ASTM E2244-02
Note: WITHDRAWN
Publication date standards: 10.10.2002
The number of pages: 9
Approximate weight : 27 g (0.06 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM E2244-02 :

Keywords:
cantilevers, combined standard uncertainty, deflection measurements, fixed-fixed beams, interferometry, length measurements, microelectromechanical systems, MEMS, polysilicon, residual strain, strain gradient, test structure, ICS Number Code 37.040.20 (Photographic paper, film and plates. Cartridges)