Standard Test Method for Residual Strain Measurements of Thin, Reflecting Films Using an Optical Interferometer (Includes all amendments And changes 5/28/2018).
STANDARD published on 1.11.2011
Designation standards: ASTM E2245-11e1
Note: WITHDRAWN
Publication date standards: 1.11.2011
The number of pages: 25
Approximate weight : 75 g (0.17 lbs)
Country: American technical standard
Category: Technical standards ASTM
Keywords:
cantilevers, combined standard uncertainty, fixed-fixed beams, interferometry, length measurements, microelectromechanical systems, MEMS, polysilicon, residual strain, round robin, stiction, strain gradient, test structure, ICS Number Code 37.040.20 (Photographic paper, film and plates. Cartridges)