Standard Practice for Approximate Determination of Current Density of Large-Diameter Ion Beams for Sputter Depth Profiling of Solid Surfaces
STANDARD published on 10.4.2000
Designation standards: ASTM E684-95(2000)
Note: WITHDRAWN
Publication date standards: 10.4.2000
The number of pages: 2
Approximate weight : 6 g (0.01 lbs)
Country: American technical standard
Category: Technical standards ASTM
Keywords:
ion beam sputtering, ICS Number Code 17.220.20 (Measurement of electrical and magnetic quantities)