ASTM E986-04

Standard Practice for Scanning Electron Microscope Beam Size Characterization

STANDARD published on 1.7.2004

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The information about the standard:

Designation standards: ASTM E986-04
Note: WITHDRAWN
Publication date standards: 1.7.2004
The number of pages: 3
Approximate weight : 9 g (0.02 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM E986-04 :

Keywords:
electron beam size, E 766, graphite fiber, magnification, NIST-SRM 2069B, resolution, SEM, SEM performance, spot size, waveform, ICS Number Code 31.120 (Electronic display devices), 37.020 (Optical equipment)