ASTM E986-97

Standard Practice for Scanning Electron Microscope Beam Size Characterization

STANDARD published on 10.10.1997

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The information about the standard:

Designation standards: ASTM E986-97
Note: WITHDRAWN
Publication date standards: 10.10.1997
The number of pages: 3
Approximate weight : 9 g (0.02 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM E986-97 :

Keywords:
edge sharpness, electron beam size, E 766, graphite fiber, magnification, NIST-SRM 2069B, performance, SEM, specimen interaction, waveform, ICS Number Code 31.120 (Electronic display devices), 37.020 (Optical equipment)