NORMSERVIS s.r.o.

ASTM F1049-00

Standard Practice for Shallow Etch Pit Detection on Silicon Wafers

STANDARD published on 10.6.2000

English -
Online Secure PDF (77.00 USD)
English -
Print design (77.00 USD)

The information about the standard:

Designation standards: ASTM F1049-00
Note: WITHDRAWN
Publication date standards: 10.6.2000
The number of pages: 4
Approximate weight : 12 g (0.03 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F1049-00 :

Keywords:
Defects-semiconductors, Etching, Haze, wafers (silicon)- shallow etch pit detection, test,, Microscopic examination-electronic materials, wafers (silicon)- shallowetch pit detection, test, ICS Number Code 29.045 (Semiconducting materials)