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ASTM F1049-02

Standard Practice for Shallow Etch Pit Detection on Silicon Wafers (Withdrawn 2003

STANDARD published on 10.12.2002

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The information about the standard:

Designation standards: ASTM F1049-02
Note: WITHDRAWN
Publication date standards: 10.12.2002
The number of pages: 4
Approximate weight : 12 g (0.03 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F1049-02 :

Keywords:
epitaxial, oxidation, preferential etch, saucer pit, shallow etch pit, silicon, ICS Number Code 29.045 (Semiconducting materials)