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ASTM F1238-95(1999)

Standard Specification for Refractory Silicide Sputtering Targets for Microelectronic Applications

STANDARD published on 10.12.1999

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The information about the standard:

Designation standards: ASTM F1238-95(1999)
Note: WITHDRAWN
Publication date standards: 10.12.1999
The number of pages: 2
Approximate weight : 6 g (0.01 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F1238-95(1999) :

Keywords:
density, microelectronics, molybdenum, disilicide, refractory silicides, sputtering, sputtering targets, tantalum disilicide, titanium disilicide, tungsten disilicide, ICS Number Code 31.100 (Electronic tubes)