ASTM F1239-02

Standard Test Methods for Oxygen Precipitation Characterization of Silicon Wafers by Measurement of Interstitial Oxygen Reduction (Withdrawn 2003)

STANDARD published on 10.1.2002

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The information about the standard:

Designation standards: ASTM F1239-02
Note: WITHDRAWN
Publication date standards: 10.1.2002
The number of pages: 5
Approximate weight : 15 g (0.03 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F1239-02 :

Keywords:
delta O, interstitial oxygen, oxygen precipitation, oxygen reduction, silicon, ICS Number Code 29.045 (Semiconducting materials)