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ASTM F1261M-96

Standard Test Method for Determining the Average Electrical Width of a Straight, Thin-Film Metal Line [Metric]

STANDARD published on 1.1.1996

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The information about the standard:

Designation standards: ASTM F1261M-96
Note: WITHDRAWN
Publication date standards: 1.1.1996
The number of pages: 4
Approximate weight : 12 g (0.03 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F1261M-96 :

Keywords:
aluminum, electrical interconnect, electrical linewidth, linewidth, metallization, semiconductor, test structure, thin film, ICS Number Code 31.080.01 (Semi-conductor devices in general)