Standard Test Method for Energy Dispersive X-Ray Spectrometer (EDX) Analysis of Metallic Surface Condition for Gas Distribution System Components
STANDARD published on 10.6.1999
Designation standards: ASTM F1375-92(1999)
Note: WITHDRAWN
Publication date standards: 10.6.1999
The number of pages: 4
Approximate weight : 12 g (0.03 lbs)
Country: American technical standard
Category: Technical standards ASTM
Keywords:
Electron microscopy, Gas distribution systems, Scanning electron microscope (SEM), Semiconductor clean rooms, Spectrometry-x-ray emission, Stainless steel-gas distribution systems, Surface analysis-metals/alloys, analysis of metallic surface condition for gas distribution system, components, using energy dispersive x-ray spectrometry (EDX), test, ICS Number Code 17.040.20 (Properties of surfaces)