ASTM F1392-00

Standard Test Method for Determining Net Carrier Density Profiles in Silicon Wafers by Capacitance-Voltage Measurements With a Mercury Probe

STANDARD published on 10.6.2000

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The information about the standard:

Designation standards: ASTM F1392-00
Note: WITHDRAWN
Publication date standards: 10.6.2000
The number of pages: 14
Approximate weight : 42 g (0.09 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F1392-00 :

Keywords:
capacitance-voltage method, carrier density, carrier density profile, depth profile, epitaxial wafers, mercury probe, net carrier density, polished wafers, profiles, resistivity, silicon, single crystal silicon, ICS Number Code 29.045 (Semiconducting materials)