Standard Test Method for Determining Net Carrier Density Profiles in Silicon Wafers by Capacitance-Voltage Measurements With a Mercury Probe (Withdrawn 2003)
STANDARD published on 10.12.2002
Designation standards: ASTM F1392-02
Note: WITHDRAWN
Publication date standards: 10.12.2002
The number of pages: 14
Approximate weight : 42 g (0.09 lbs)
Country: American technical standard
Category: Technical standards ASTM
Keywords:
capacitance-voltage method, carrier density, carrier density profile, depth profile, epitaxial wafers, mercury probe, net carrier density, polished wafers, profiles, resistivity, silicon, single crystal silicon, ICS Number Code 29.045 (Semiconducting materials)