ASTM F1393-02

Standard Test Method for Determining Net Carrier Density in Silicon Wafers by Miller Feedback Profiler Measurements With a Mercury Probe (Withdrawn 2003)

STANDARD published on 10.12.2002

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The information about the standard:

Designation standards: ASTM F1393-02
Note: WITHDRAWN
Publication date standards: 10.12.2002
The number of pages: 8
Approximate weight : 24 g (0.05 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F1393-02 :

Keywords:
depth profile, epitaxial wafers, mercury probe, miller feedback method, net carrier density, silicon, ICS Number Code 29.045 (Semiconducting materials)