Standard Test Method for Determining Net Carrier Density in Silicon Wafers by Miller Feedback Profiler Measurements With a Mercury Probe

The information about the standard:

Designation standards: ASTM F1393-92(1997)
Note: WITHDRAWN
Publication date standards: 1.1.1992
The number of pages: 7
Approximate weight : 21 g (0.05 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F1393-92(1997) :

Keywords:
Density-electronic applications, Depth profiling, Diodes, Electrical conductors-semiconductors, Mercury probe, Miller feedback profiler, Net carrier density (in semiconductors), Polished silicon wafers/slices, Probe methods, Resistance and resistivity (electrical)-semiconductors, Schottky barrier diode, Silicon-semiconductor applications, Single-crystal silicon, Voltage, net carrier density profiles in epitaxial/polished bulk silicon wafers,