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ASTM F1398-93(2005)

Standard Test Method for Determination of Total Hydrocarbon Contribution by Gas Distribution System Components

STANDARD published on 1.1.2005

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The information about the standard:

Designation standards: ASTM F1398-93(2005)
Note: WITHDRAWN
Publication date standards: 1.1.2005
The number of pages: 10
Approximate weight : 30 g (0.07 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F1398-93(2005) :

Keywords:
Argon, Condensable hydrocarbons, Contamination, Flame ionization detectors (FID), Flow and flow rate-semiconductor applications, Gas distribution systems, Hydrocarbons, Instrumental measurement, Mass flow controller (MFC), Methane (CH[inf]4[reset]) equivalent, Minimum detection limit (MDL), Nitrogen, Noncondensable hydrocarbons, Semiconductor clean rooms, Spectrometry-mass, Spool piece, Stainless steel-gas distribution systems, Total hydrocarbons (THC)