ASTM F1451-92(1999)

Standard Test Method for Measuring Sori on Silicon Wafers by Automated Noncontact Scanning (Withdrawn 2003)

STANDARD published on 1.1.1999

English -
PDF - Immediate download (91.00 USD)

The information about the standard:

Designation standards: ASTM F1451-92(1999)
Note: WITHDRAWN
Publication date standards: 1.1.1999
The number of pages: 12
Approximate weight : 36 g (0.08 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F1451-92(1999) :

Keywords:
noncontact measurement, semiconductor, shape, silicon, sori, wafers, ICS Number Code 29.045 (Semiconducting materials)