Standard Practice for Ultrasonic C-Scan Bond Evaluation of Sputtering Target-Backing Plate Assemblies
STANDARD published on 10.12.1999
Designation standards: ASTM F1512-94(2003)
Note: WITHDRAWN
Publication date standards: 10.12.1999
The number of pages: 4
Approximate weight : 12 g (0.03 lbs)
Country: American technical standard
Category: Technical standards ASTM
Keywords:
backing plates, bonding, nondestructive testing, sputtering, targets, thin films, ultrasonic testing, ICS Number Code 19.100 (Non-destructive testing)