ASTM F1513-99(2003)

Standard Specification for Pure Aluminum (Unalloyed) Source Material for Electronic Thin Film Applications

STANDARD published on 10.12.1999

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The information about the standard:

Designation standards: ASTM F1513-99(2003)
Note: WITHDRAWN
Publication date standards: 10.12.1999
The number of pages: 2
Approximate weight : 6 g (0.01 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F1513-99(2003) :

Keywords:
aluminum, coating, evaporation, sputtering, targets, thin films, vacuum coating, ICS Number Code 31.200 (Integrated circuits. Microelectronics)