ASTM F1526-95(2000)

Standard Test Method for Measuring Surface Metal Contamination on Silicon Wafers by Total Reflection X-Ray Fluorescence Spectroscopy (Withdrawn 2003)

STANDARD published on 1.1.2000

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The information about the standard:

Designation standards: ASTM F1526-95(2000)
Note: WITHDRAWN
Publication date standards: 1.1.2000
The number of pages: 7
Approximate weight : 21 g (0.05 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F1526-95(2000) :

Keywords:
contamination, metals, silicone, surface, TXRF, X-ray fluorescence, ICS Number Code 29.045 (Semiconducting materials)