ASTM F154-02

Standard Guide for Identification of Structures and Contaminants Seen on Specular Silicon Surfaces (Withdrawn 2003)

STANDARD published on 10.1.2001

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The information about the standard:

Designation standards: ASTM F154-02
Note: WITHDRAWN
Publication date standards: 10.1.2001
The number of pages: 13
Approximate weight : 39 g (0.09 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F154-02 :

Keywords:
contaminant, defects, dislocation, epitaxial, fracture, preferential etch, scratch, shallow pit, silicon, slip, stacking fault, ICS Number Code 17.040.20 (Properties of surfaces)