ASTM F1617-98(2002)

Standard Test Method for Measuring Surface Sodium, Aluminum, Potassium, and Iron on Silicon and EPI Substrates by Secondary Ion Mass Spectrometry (Withdrawn 2003)

STANDARD published on 10.5.1998

English -
PDF - Immediate download (83.00 USD)

English -

Print design (83.00 USD)

The information about the standard:

Designation standards: ASTM F1617-98(2002)
Note: WITHDRAWN
Publication date standards: 10.5.1998
The number of pages: 5
Approximate weight : 15 g (0.03 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F1617-98(2002) :

Keywords:
aluminum, iron, potassium, silicon, SIMS, sodium, surface contamination, ICS Number Code 77.040.30 (Chemical analysis of metals)