ASTM F1618-02

Standard Practice for Determination of Uniformity of Thin Films on Silicon Wafers (Withdrawn 2003)

STANDARD published on 10.5.2002

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The information about the standard:

Designation standards: ASTM F1618-02
Note: WITHDRAWN
Publication date standards: 10.5.2002
The number of pages: 7
Approximate weight : 21 g (0.05 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F1618-02 :

Keywords:
dielectric layers, epitaxial layers, ion implant, metal films, sampling plans, semiconductor, silicon, thin films, uniformity, ICS Number Code 29.045 (Semiconducting materials)