ASTM F1618-96

Standard Practice for Determination of Uniformity of Thin Films on Silicon Wafers

STANDARD published on 1.1.1996

English -
electronic design (pdf) (83.00 USD)

The information about the standard:

Designation standards: ASTM F1618-96
Note: WITHDRAWN
Publication date standards: 1.1.1996
The number of pages: 7
Approximate weight : 21 g (0.05 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F1618-96 :

Keywords:
dielectric layers, epitaxial layers, ion implant, metal films, sampling plans, semiconductor, silicon, thin films, uniformity, ICS Number Code 29.045 (Semiconducting materials)