ASTM F1620-96

Standard Practice for Calibrating a Scanning Surface Inspection System Using Monodisperse Polystyrene Latex Spheres Deposited on Polished or Epitaxial Wafer Surfaces (Withdrawn 2003)

STANDARD published on 1.1.1996

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The information about the standard:

Designation standards: ASTM F1620-96
Note: WITHDRAWN
Publication date standards: 1.1.1996
The number of pages: 6
Approximate weight : 18 g (0.04 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F1620-96 :

Keywords:
Calibration-semiconductor analysis instrumentation, Multipoint size calibration, Particle counting, Particle size calibration, Polystyrene latex spheres (PSL), PSL (polystyrene latex spheres), Scanning surface inspection system (SSIS), Silicon semiconductors-slices/wafers, SSIS (scanning surface inspection system), scanning surface inspection system (SSIS)-size calibration, using, monodisperse polystyrene latex spheres (PSL) deposited on