Standard Specification for High Purity Titanium Sputtering Targets for Electronic Thin Film Applications
STANDARD published on 15.6.2008
Designation standards: ASTM F1709-97(2008)
Note: WITHDRAWN
Publication date standards: 15.6.2008
The number of pages: 3
Approximate weight : 9 g (0.02 lbs)
Country: American technical standard
Category: Technical standards ASTM
Keywords:
coating, sputtering, target, thin film, titanium, Electronic materials/applications--specifications, Electronic thin-film applications--specifications, High-purity titanium, Sputtering process/targets--specifications, Thin film applications, Titanium sputtering targets, Titanium (Ti)/alloys--specifications, ICS Number Code 31.120 (Electronic display devices)