Standard Guide for Analyis of Crystallographic Perfection of Silicon Wafers
STANDARD published on 10.6.1997
Designation standards: ASTM F1726-97
Note: WITHDRAWN
Publication date standards: 10.6.1997
The number of pages: 3
Approximate weight : 9 g (0.02 lbs)
Country: American technical standard
Category: Technical standards ASTM
Keywords:
dislocation, epitaxy, grain boundaries, hillock, polycrystalline imperfections, preferential etch, shallow pit, silicon, slip, stacking fault, ICS Number Code 29.045 (Semiconducting materials)