Standard Guide for Selection and Use of Etching Solutions to Delineate Structural Defects in Silicon
STANDARD published on 10.6.1997
Designation standards: ASTM F1809-97
Note: WITHDRAWN
Publication date standards: 10.6.1997
The number of pages: 9
Approximate weight : 27 g (0.06 lbs)
Country: American technical standard
Category: Technical standards ASTM
Keywords:
defect density, dislocation, grain boundary, microscopic, polycrystalline, imperfection, preferential etch, silicon, slip, ICS Number Code 29.045 (Semiconducting materials)