ASTM F1810-97

Standard Test Method for Counting Preferentially Etched or Decorated Surface Defects in Silicon Wafers

STANDARD published on 10.6.1997

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The information about the standard:

Designation standards: ASTM F1810-97
Note: WITHDRAWN
Publication date standards: 10.6.1997
The number of pages: 4
Approximate weight : 12 g (0.03 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F1810-97 :

Keywords:
defect density, dislocation, grain boundary, microscopic, polycrystalline imperfection, preferential etch, silicon, slip