ASTM F1894-98

Test Method for Quantifying Tungsten Silicide Semiconductor Process Films for Composition and Thickness

STANDARD published on 10.5.1998

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The information about the standard:

Designation standards: ASTM F1894-98
Note: WITHDRAWN
Publication date standards: 10.5.1998
The number of pages: 7
Approximate weight : 21 g (0.05 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F1894-98 :

Keywords:
analysis of tungsten silicide, backscattering analysis, composition, metallization films, quantitative analysis, RBS, Wsix, ICS Number Code 29.045 (Semiconducting materials)