ASTM F2113-01(2007)

Standard Guide for Analysis and Reporting the Impurity Content and Grade of High Purity Metallic Sputtering Targets for Electronic Thin Film Applications

STANDARD published on 1.6.2007

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The information about the standard:

Designation standards: ASTM F2113-01(2007)
Note: WITHDRAWN
Publication date standards: 1.6.2007
The number of pages: 2
Approximate weight : 6 g (0.01 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F2113-01(2007) :

Keywords:
electronics, purity analysis, purity grade, sputtering, target, thin film, ICS Number Code 29.045 (Semiconducting materials)