ASTM F2113-01e1

Standard Guide for Analysis and Reporting the Impurity Content and Grade of High Purity Metallic Sputtering Targets for Electronic Thin Film Applications (Includes all amendments And changes 8/16/2017).

STANDARD published on 10.6.2001

English -
PDF - Immediate download (73.00 USD)

English -

Print design (73.00 USD)

The information about the standard:

Designation standards: ASTM F2113-01e1
Note: WITHDRAWN
Publication date standards: 10.6.2001
The number of pages: 2
Approximate weight : 6 g (0.01 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F2113-01e1 :

Keywords:
electronics, purity analysis, purity grade, sputtering, target, thin film, ICS Number Code 29.045 (Semiconducting materials)