ASTM F2139-01

Standard Test Method for Measuring Nitrogen Concentration in Silicon Substrates by Secondary Ion Mass Spectrometry (Withdrawn 2003)

STANDARD published on 10.10.2001

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The information about the standard:

Designation standards: ASTM F2139-01
Note: WITHDRAWN
Publication date standards: 10.10.2001
The number of pages: 6
Approximate weight : 18 g (0.04 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F2139-01 :

Keywords:
nitrogen concentration, secondary ion mass spectrometry, silicon, SIMS, ICS Number Code 71.040.50 (Physicochemical methods of analysis)