ASTM F399-00a

Standard Test Method for Thickness of Heteroepitaxial or Polysilicon Layers (Withdrawn 2002) (Includes all amendments And changes 2/18/2021).

STANDARD published on 10.12.2000

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The information about the standard:

Designation standards: ASTM F399-00a
Note: WITHDRAWN
Publication date standards: 10.12.2000
The number of pages: 4
Approximate weight : 12 g (0.03 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F399-00a :

Keywords:
epi, epitaxial, layer thickness, poly, polysilicon, profilometer, step height, ICS Number Code 29.045 (Semiconducting materials)