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ASTM F416-94

Test Method for Detection of Oxidation Induced Defects in Polished Silicon Wafers (Withdrawn 1998)

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The information about the standard:

Designation standards: ASTM F416-94
Note: WITHDRAWN
The number of pages: 11
Approximate weight : 33 g (0.07 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F416-94 :

Keywords:
ICS Number Code 29.045 (Semiconducting materials)