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ASTM F523-02

Standard Practice for Unaided Visual Inspection of Polished Silicon Wafer Surfaces (Withdrawn 2003)

STANDARD published on 10.12.2002

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The information about the standard:

Designation standards: ASTM F523-02
Note: WITHDRAWN
Publication date standards: 10.12.2002
The number of pages: 5
Approximate weight : 15 g (0.03 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F523-02 :

Keywords:
collimated light, defects, high-intensity light, particle, polished, silicon, visual inspection, ICS Number Code 29.045 (Semiconducting materials)