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ASTM F523-93(1997)

Standard Practice for Unaided Visual Inspection of Polished Silicon Wafer Surfaces

STANDARD published on 10.12.1997

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The information about the standard:

Designation standards: ASTM F523-93(1997)
Note: WITHDRAWN
Publication date standards: 10.12.1997
The number of pages: 5
Approximate weight : 15 g (0.03 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F523-93(1997) :

Keywords:
Polished silicon wafers/slices, Visual examination-electronic components/devices, wafers (silicon)-polished, unaided visual inspection, practice,, Silicon semiconductors-slices/wafers, slices (polished)-unaided visual inspection, practice, ICS Number Code 29.045 (Semiconducting materials)