ASTM F525-00a

Standard Test Method for Measuring Resistivity of Silicon Wafers Using a Spreading Resistance Probe (Withdrawn 2003) (Includes all amendments And changes 8/16/2017).

STANDARD published on 10.12.2000

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The information about the standard:

Designation standards: ASTM F525-00a
Note: WITHDRAWN
Publication date standards: 10.12.2000
The number of pages: 14
Approximate weight : 42 g (0.09 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F525-00a :

Keywords:
calibration, epitaxial layer, resistivity, silicon, spreading resistance, spreading resistance probe, ICS Number Code 29.045 (Semiconducting materials)