ASTM F533-02

Standard Test Method for Thickness and Thickness Variation of Silicon Wafers

STANDARD published on 10.1.2002

The information about the standard:

Designation standards: ASTM F533-02
Note: WITHDRAWN
Publication date standards: 10.1.2002
The number of pages: 4
Approximate weight : 12 g (0.03 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F533-02 :

Keywords:
semiconductor, silicon, thickness, thickness variation, total thickness variation, wafer, ICS Number Code 29.045 (Semiconducting materials)