ASTM F533-02a

Standard Test Method for Thickness and Thickness Variation of Silicon Wafers (Withdrawn 2003) (Includes all amendments And changes 8/16/2017).

STANDARD published on 10.12.2002

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The information about the standard:

Designation standards: ASTM F533-02a
Note: WITHDRAWN
Publication date standards: 10.12.2002
The number of pages: 5
Approximate weight : 15 g (0.03 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F533-02a :

Keywords:
semiconductor, silicon, thickness, thickness variation, total thickness variation, wafer, ICS Number Code 29.045 (Semiconducting materials)