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ASTM F534-02a

Standard Test Method for Bow of Silicon Wafers (Withdrawn 2003) (Includes all amendments And changes 8/16/2017).

STANDARD published on 10.12.2002

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The information about the standard:

Designation standards: ASTM F534-02a
Note: WITHDRAWN
Publication date standards: 10.12.2002
The number of pages: 3
Approximate weight : 9 g (0.02 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F534-02a :

Keywords:
bow, silicon, wafers, ICS Number Code 29.045 (Semiconducting materials)