Standard Test Method for Measuring Flat Length on Wafers of Silicon and Other Electronic Materials (Withdrawn 2003)
STANDARD published on 10.12.1999
Designation standards: ASTM F671-99
Note: WITHDRAWN
Publication date standards: 10.12.1999
The number of pages: 4
Approximate weight : 12 g (0.03 lbs)
Country: American technical standard
Category: Technical standards ASTM
Keywords:
flats, optical comparator, orientation flats, semiconductor, silicon, ICS Number Code 29.045 (Semiconducting materials)