ASTM F672-01

Standard Test Method for Measuring Resistivity Profiles Perpendicular to the Surface of a Silicon Wafer Using a Spreading Resistance Probe (Withdrawn 2003)

STANDARD published on 10.6.2001

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The information about the standard:

Designation standards: ASTM F672-01
Note: WITHDRAWN
Publication date standards: 10.6.2001
The number of pages: 18
Approximate weight : 54 g (0.12 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F672-01 :

Keywords:
carrier density profile, profile, resistivity profile, spreading resistance, spreading resistance probe, spreading resistance profile, SRP, ICS Number Code 29.045 (Semiconducting materials)