ASTM F775-88

Test Method for Wafer and Slice Flatness by Interferometric (Withdrawn 1991)

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The information about the standard:

Designation standards: ASTM F775-88
Note: WITHDRAWN
The number of pages: 7
Approximate weight : 21 g (0.05 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F775-88 :

Keywords:
ICS Number Code 29.045 (Semiconducting materials)