ASTM F81-01

Standard Test Method for Measuring Radial Resistivity Variation on Silicon Wafers (Withdrawn 2003)

STANDARD published on 10.6.2001

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The information about the standard:

Designation standards: ASTM F81-01
Note: WITHDRAWN
Publication date standards: 10.6.2001
The number of pages: 9
Approximate weight : 27 g (0.06 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F81-01 :

Keywords:
four-point probe, resistivity, resistivity variation, semiconductor, silicon, uniformity, ICS Number Code 29.045 (Semiconducting materials)