ASTM F84-02

Standard Test Method for Measuring Resistivity of Silicon Wafers With an In-Line Four-Point Probe (Withdrawn 2003)

STANDARD published on 10.12.2002

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The information about the standard:

Designation standards: ASTM F84-02
Note: WITHDRAWN
Publication date standards: 10.12.2002
The number of pages: 14
Approximate weight : 42 g (0.09 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F84-02 :

Keywords:
four-point probe, four-probe, resistivity, semiconductor, silicon, ICS Number Code 29.045 (Semiconducting materials)