ASTM F847-02

Standard Test Methods for Measuring Crystallographic Orientation of Flats on Single Crystal Silicon Wafers by X-Ray Techniques (Withdrawn 2003)

STANDARD published on 10.12.2002

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The information about the standard:

Designation standards: ASTM F847-02
Note: WITHDRAWN
Publication date standards: 10.12.2002
The number of pages: 8
Approximate weight : 24 g (0.05 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F847-02 :

Keywords:
crystallographic orientation, flats, Laue defraction, silicon, single crystal, ICS Number Code 29.045 (Semiconducting materials)