Standard Test Methods for Measuring Crystallographic Orientation of Flats on Single Crystal Silicon Wafers by X-Ray Techniques

The information about the standard:

Designation standards: ASTM F847-94(1999)
Note: WITHDRAWN
Publication date standards: 1.1.1999
The number of pages: 8
Approximate weight : 24 g (0.05 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F847-94(1999) :

Keywords:
Angular deviation, Crystal lattice structure, Fiducial flats, Laue method, Nondestructive evaluation (NDE)-Laue method, Single-crystal silicon, Surface analysis-electronic components/devices, X-ray diffraction, crystallographic orientation of flats on single crystal silicon, slices/wafers, by x-ray techniques, test,, Silicon semiconductors-slices/wafers, wafers/slices-crystallographic orientation of flats on single crystals,, by x-ray techniques, test